Well I think The common methods for thin layer coatings are: Dip and Spin coating, depends upon type,size, condition etc. Where as you can use coating equipment (http://www.sono-tek.com/) .
Thanks Gunther Lippert for reply and your paper. It seems a good technique but according to my observation, the graphene is also established on SiO2 but with low quality. is that true? Because in my case, I want no graphene on certain areas of a PTFE substrate which can not stand high temperatures, even up to 500C.